assessing the potential of lipon-based electrical double layer microsupercapacitors for on-chip power storage
| Description | |
| Date | 2020 |
| Date | |
| Auteurs | Sallaz,- V | Oukassi,- S | Voiron,- F | Salot,- R | Berardan,- D | |
| Source | JOURNAL OF POWER SOURCES | |
| Résumé | In this work,- we propose a systematic study of the electrochemical behavior of an ultra-thin Lithium phosphorus oxinitride (LiPON) layer used as thin film ion conductor for inorganic solid-state on-chip supercapacitors. MetalIon conductor-Metal structures using blocking electrodes have been used to investigate the areal capacity variation with (i) UPON ionic conductivity,- (ii) electrochemical kinetics,- (iii) and the potential window. The fabricated devices exhibit box-shape cyclic voltammograms,- typical capacitance values as high as 50 mu F cm(-2) at scan rates below 100 V s(-1) over 10(5) cycles and a high nominal voltage of 3 V. The obtained results highlight the very high potential of 2D and 3D UPON based supercapacitors for on-chip power storage. |
| DOI | http://dx.doi.org/10.1016/j.jpowsour.2020.227786 |
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